JPH059229B2 - - Google Patents
Info
- Publication number
- JPH059229B2 JPH059229B2 JP1257140A JP25714089A JPH059229B2 JP H059229 B2 JPH059229 B2 JP H059229B2 JP 1257140 A JP1257140 A JP 1257140A JP 25714089 A JP25714089 A JP 25714089A JP H059229 B2 JPH059229 B2 JP H059229B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- grinding
- suction chuck
- chuck mechanism
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 claims description 36
- 230000007246 mechanism Effects 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 14
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 9
- 239000011148 porous material Substances 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 12
- 239000002344 surface layer Substances 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1257140A JPH03121778A (ja) | 1989-10-03 | 1989-10-03 | 半導体ウエハ研削盤における吸着チャック機構上面の洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1257140A JPH03121778A (ja) | 1989-10-03 | 1989-10-03 | 半導体ウエハ研削盤における吸着チャック機構上面の洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03121778A JPH03121778A (ja) | 1991-05-23 |
| JPH059229B2 true JPH059229B2 (en]) | 1993-02-04 |
Family
ID=17302272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1257140A Granted JPH03121778A (ja) | 1989-10-03 | 1989-10-03 | 半導体ウエハ研削盤における吸着チャック機構上面の洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03121778A (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009277925A (ja) * | 2008-05-15 | 2009-11-26 | Tokyo Seimitsu Co Ltd | クリーニング装置 |
| JP2009283761A (ja) * | 2008-05-23 | 2009-12-03 | Tokyo Seimitsu Co Ltd | 搬送パッドのクリーニング機構 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5443416A (en) * | 1993-09-09 | 1995-08-22 | Cybeq Systems Incorporated | Rotary union for coupling fluids in a wafer polishing apparatus |
| JP7364338B2 (ja) * | 2019-01-22 | 2023-10-18 | 株式会社ディスコ | 保持面洗浄装置 |
| CN112706060B (zh) * | 2020-12-23 | 2021-11-09 | 上海新昇半导体科技有限公司 | 具有自清洗功能的双面抛光设备及抛光方法 |
-
1989
- 1989-10-03 JP JP1257140A patent/JPH03121778A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009277925A (ja) * | 2008-05-15 | 2009-11-26 | Tokyo Seimitsu Co Ltd | クリーニング装置 |
| JP2009283761A (ja) * | 2008-05-23 | 2009-12-03 | Tokyo Seimitsu Co Ltd | 搬送パッドのクリーニング機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03121778A (ja) | 1991-05-23 |
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